Tescan Mira3 XM SEM
This high-res Field Emission SEM includes an EDAX/AMETEK Electron Backscatter Detector (EBSD) , Elemental Dispersive X-Ray Spectroscopy (EDS) and TSL OIM analysis software to obtain crystallographic orientation information. In addition, in-situ studies of nanoindentation can be conducted with a Nanomechanics InSEM nanoindenter with CSM capability. Key specifications include
- SEM resolution @ 30 kV SE – 1.2 nm
- SEM resolution @ 30 kV BSE – 2.0 nm
- Orientation resolution – 0.1 degree
- In-situ nanoindenter displacement resolution – 0.1 nm
- In-situ nanoindenter max load – 50 mN