Micro/Nano Fabrication Facility
We operate and support the region’s largest core research laboratories in several buildings on campus. Hands-on, shared user cleanroom space totals 28,500 square feet in the Marcus Nanotechnology and Pettit buildings. The cleanrooms are used for electronics, MEMS, photonics, and materials research, along with specialized class 100 bays for working at the interface between fabrication and life sciences.
Welcome to the Georgia Tech Micro/Nano Fabrication Facility
The Georgia Tech Cleanroom is a state-of-the-art facility designed to support cutting-edge research and innovation in micro- and nanofabrication. Whether you're a seasoned researcher or a first-time user, we’re here to help you navigate the tools, protocols, and resources available to you. Explore our capabilities above or read below to learn more about us.
About Us
Tool Directory: Explore our full list of characterization tools here.
Rates & Billing: View current usage rates and billing policies on our Rates & Fees page.
Safety Information: Your safety is our top priority. Access safety protocols, emergency procedures, and training materials here.
Meet the Team: Our expert staff is here to support your research. Learn more about the cleanroom team and how to contact them here.
Getting Started
Register for Access: New users must complete onboarding and training. Start by visiting the Shared User Management Systems (SUMS).
Reserve Tools: Once approved, you can schedule time on cleanroom equipment through SUMS.
Review Safety Information: Familiarize yourself with our safety procedures to ensure a safe and productive environment for all users.