The Materials Characterization Facility has five scanning electron microscopy machines plus one FIB/SEM. The Thermo Helios 5CX FIB/SEM has an easy-lift manipulator and semi-automated SW that facilitate TEM lamella preparation and liftout.
Hitachi SU 8010
The SU8010 Ultra-High Resolution (1.0nm) Scanning Electron Microscope FE-SEM has excellent imaging performance for the wide variety of demanding high-resolution applications in material research.
Hitachi SU 8230
The 8230 FE-SEM employs a novel cold field emission (CFE) gun for improved imaging and analytical performance. The newly-designed Hitachi CFE gun complements the inherent high resolution and brightness of conventional CFE with increased probe current and beam stability.
Tescan Mira3 XM SEM
This high-res Field Emission SEM includes an EDAX/AMETEK Electron Backscatter Detector (EBSD) and TSL OIM analysis software to obtain crystallographic orientation information. In addition, in-situ studies of nanoindentation can be conducted with a Nanomechanics InSEM nanoindenter with CSM capability.
Thermo Axia
The Axia ChemiSEM scanning electron microscope has a thermionic tungsten filament source and automated alignment, automated sample navigation, variable pressure feature, a backscatter detector, and live quantitative elemental mapping.
Thermo Helios 5
The Thermo Helios 5 CX combines a high-resolution Schottky FEG-based scanning electron microscope (SEM) with a high-energy Focused Ion Beam (FIB) using Gallium-69. The system can accommodate circular samples up to 50mm in diameter and approximately 20-25mm tall (the stage has about a 25mm Z-travel).
Zeiss Ultra 60
The Zeiss Ultra 60 FE-SEM has a minimum 1.1nm resolution utilizing a Schottky FEG gun. The system can operate at voltages down to 200V and can accommodate samples up to 200mm in diameter through the loadlock.