Short Course | Microfabrication
This intensive two-day short course combines classroom lectures and laboratory-based hands-on fabrication in the Institute for Matter and Systems cleanroom. The goal of the course is to impart a basic understanding of the science and technology of microfabrication processes as used in academia and industry.
This intensive two-day short course combines classroom lectures and laboratory-based hands-on fabrication in the Institute for Matter and Systems cleanroom. The goal of the course is to impart a basic understanding of the science and technology of microfabrication processes as used in academia and industry. This short course will cover essential microfabrication techniques including photolithography, thin film deposition, etching, packaging, and characterization. Attendees will gain valuable experience by fabricating simple devices in one of the most advanced university cleanrooms in North America.
Attendance is open to the general technical community and is not limited to current Georgia Tech students or Institute for Matter and Systems (IMS) users. Anyone interested in cleanroom fabrication techniques is strongly encouraged to attend this course. The course is suitable for both new and experienced researchers interested in microfabrication techniques and applications. A course emphasis will be placed on IMS cleanroom resources, however, the concepts and techniques discussed are applicable to a broad array of research in this field.
Day 1 Agenda
Thursday, August 22
7:30-8:00 Registration and Breakfast
8:00-8:15 Introduction/Orientation (Michelle Wu)
8:15-9:00 Photolithography lecture part 1, lab session overview (Durga Gajula)
9:00-12:00 Lab Session (Marcus Inorganic Cleanroom)
12:00-1:00 Lunch
1:00-2:00 Photolithography Lecture part 2 (Durga Gajula)
2:00-2:10 Break
2:10-3:10 PVD Lecture (Michelle Wu)
3:10-4:00 Lift-off in cleanroom
4:00-5:00 Metrology Lecture (Nikolas Roeske)
Day 2 Agenda
Friday, August 23
8:00-12:00 Lab Session
12:00-1:00 Lunch
1:00-2:00 CVD Lecture (Hang Chen)
2:00-2:10 Break
2:10-3:10 Etch Lecture (Seung Joon Paik)
3:10-3:20 Break
3:20-4:20 3D Printing Lecture (Nikolas Roeske)
4:30-5:00 Summary
Dress Code
There is a mandatory dress code for access to the IMS cleanroom which must be adhered to.
- Shoes: Socks or stockings are required. Shoes must be closed-toe shoes that fully enclose the heel and the top of the foot. Additionally, the shoes must not have a high heel (over one inch) or a deep cleat that may hold mud or other dirt. Also, your shoes must be clean and dry when you enter the facility.
- Not Allowed: Sandals, open weave shoes, or shoes that expose the top of the foot.
- Shirt: Your shirt must be at least a short sleeve shirt that is long enough to reach your pants (no bare midriffs) and it must not have a deep neckline.
- Not Allowed: Tank tops, halter tops, and spaghetti strap tops.
- Pants: Pants must be full-length, from waist to ankle.
- Not Allowed: Shorts or short pants, tight pants. NO skirts or dresses.
Directions and Parking
Parking is not included in the cost of the course. If you are a visitor, and you would like to park on campus, you will need to use the pay-by-the hour visitor parking lot, located across from the Marcus Nanotechnology Building. We are also easily accessable via public transportation and Georgia Tech transportation services. Information on these services, and directions to Georgia Tech and IMS, can be found here.